���C+Ӌ���� | MF-501+MFC-101 | MF-501+TC-101 | MH-15M+TC-101 |
�y������ | 0-50mm | 0-15mm | |
��С�xȡֵ | 0.1µm,Ҳ���D�Q��0.5µm��1µm | 0.01µm��Ҳ���D�Q��5µm��1µm��0.1µm��0.05µm | |
���ȣ�20�棩 | 1µm | 0.7µm | |
푑��ٶ� | ����500mm/s | ����100mm/s | |
�y������ | �·���1.127—1.617N����׃�����s0.294N�� �M����0.637-1.225N | �Ϸ���0.245N,����0.637N,�M����0.441N��*����������ጷ��� | |
�ⲿݔ�� | RS-232C ���ô�ӡ�Cݔ�� | ||
ʹ�Üضȷ��� | 0�棭��-+40�� | ||
���������C�� | �s460g | �s140g |